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Search : "[ author: Lim KT ]" (8)
A Green Preparation of Drug Loaded PAc-β-CD Nanoparticles from Supercritical Fluid
Jang MK  Kim YH  Kim DW  Lee SY  Lim KT

Vol. 26, No. 1, pp. 1-6, Mar. 2020
10.7464/ksct.2020.26.1.1
The Removal of Si3N4 Particles from the Wafer Surface Using Supercritical Carbon Dioxide Cleaning
Kim YH  Choi HW  Kang KM  Karakin A  Lim KT

Vol. 24, No. 3, pp. 157-165, Sep. 2018
10.7464/ksct.2018.24.3.157
Study of Supercritical Carbon Dioxide/n-Butyl Acetate Co-solvent System with High Selectivity in Photoresist Removal Process
Kim DW  Heo H  Lim KT
Vol. 23, No. 4, pp. 357-363, Dec. 2017
10.7464/ksct.2017.23.4.357
Effect of Alcohols on the Dry Etching of Sacrificial SiO2 in Supercritical CO2
Kim DH  Jang MJ  Lim KT
Vol. 18, No. 3, pp. 280-286, Sep. 2012

Efficient Stripping of High-dose Ion-implanted Photoresist in Supercritical Carbon Dioxide
Kim DH  Lim ES  Lim KT
Vol. 17, No. 4, pp. 300-305, Dec. 2011

Repair of Plasma Damaged Low-k Film in Supercritical Carbon Dioxide
Jung JM  Lim KT
Vol. 16, No. 3, pp. 191-197, Sep. 2010

Stripping of High-Dose Ion-Implanted Photoresist Using Co-solvent and Ultra-sonication in Supercritical Carbon Dioxide
Kim SH  Lim KT
Vol. 15, No. 2, pp. 69-74, Jun. 2009

Ring-Opening Polymerization of L-Lactide with Polydimethylsiloxane Based Stabilizers in Supercritical Carbon Dioxide
Hwang HS  Lim KT
Vol. 12, No. 2, pp. 62-66, Jun. 2006

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pISSN : 1598 - 9712
eISSN : 2288 - 0690

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